Technology Fellow
Merck/EMD
SPRINGFIELD, PA, United States
Name: Ralph R. Dammel
Title/ Position: Technology Fellow, CTO Office
Company: EMD Electronics
Ralph R. Dammel (*April 29, 1954) received a Ph.D. in Chemistry from the J.W. Goethe University in Frankfurt/FRG in 1986. He has worked for EMD Performance Materials/Merck KGaA or its predecessor organizations in Germany, the US, Hong Kong, and Thailand since then, and is currently employed as Technology Fellow in the CTO Office of Merck KGaA’s Performance Materials division.
Dr. Dammel is the author of over 200 scientific papers in chemistry and microlithography and is an inventor on over 470 patents in 100 patent families in the field. His monograph “Diazonaphthoquinone-based Resists” is generally recognized as the definitive book on the subject. In spring 2009, Dr. Dammel was elected as SPIE Fellow. He received the Photopolymer Science and Technology Outstanding Achievement Award in June 2011, SPIE’s Frits Zernicke Award for Microlithography in February 2015, and Merck KGaA’s Science Award in 2020.
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Development of Sustainable Materials for Semiconductor Patterning
Wednesday, July 10, 2024
1:25pm – 1:45pm PDT