Water in Fabs of the Future

As semiconductor technology advances, Fab water consumption has surged, driven by more complex processes and higher wafer outputs. This presentation provides insights into the critical areas of water use within Fabs, from Ultra-Pure Water (UPW) in tools to cooling towers and other uses. The reasons why water consumption is increasing will be discussed along with traditional wastewater management methods. Emphasizing the growing necessity for wastewater reclamation due to water scarcity and sustainability goals, new strategies and technologies for reclaiming water will be explored, including advanced membrane systems and resource recovery technologies. The discussion will highlight the challenges of enhanced wastewater reclaim, such as brine management and the balance between Fab energy consumption and water consumption. Finally, we will outline a future vision for holistic water management in semiconductor Fabs, focusing on greenfield designs that maximize reclaim and minimize freshwater consumption.