Automating Gas Delivery: A Safety and Cost Win-Win for Semiconductor Fabrication
Semiconductor fabrication relies heavily on dangerous materials, including highly toxic gases like tungsten hexafluoride (WF6) stored and delivered through gas cabinets. Unlike other automated processes, gas cylinder handling remains heavily manual, posing significant safety risks (fires, explosions, worker exposure) and incurring substantial costs for fab (fabrication plant) operators. South Korea, for instance, mandates 3 laborers per team to manage only 60 gas cabinets, highlighting the inefficiencies of the current approach.
This paper proposes a cost-effective and safety-enhancing solution: a fully automated Gas Delivery Logistics System (GDLS). The GDLS automates the entire gas cylinder handling process – unloading, transportation, and loading – from storage to gas cabinets, eliminating the need for manual labor and offering substantial cost savings for fab operators.
Components of the GDLS: 1. Automated Gas Cabinet (AGC): Equipped with autonomous handling capabilities, the AGC completes gas cylinder changeouts within 20 minutes (including leak tests) compared to 2-4 hours manually, boosting fab uptime. 2. Automated Guided Vehicle (AGV): Acts as a self-navigating transport system, carrying cylinders between the AGC and storage, eliminating manual intervention and reducing labor requirements. 3. Automated Stocker (ASTKR): Manages inventory within the storage room, selecting and preparing cylinders for AGV pick-up, optimizing storage space and cylinder utilization. 4. Gas Logistics Control Server: The central control hub, coordinating communication and issuing commands to all components, ensuring smooth operation and seamless integration with the existing gas delivery system.
Cost-Effectiveness and Safety Advantages of GDLS: • Reduced labor costs: Eliminates the need for dedicated personnel for gas changes, significantly lowering labor costs compared to the manual approach. Additionally, lower labor needs may reduce training costs associated with manual gas handling procedures. • Increased production efficiency: Faster changeouts lead to reduced downtime and enhanced fab productivity. • Improved safety: Automation eliminates risks associated with manual handling, mitigating potential accidents, injuries, and related costs. • Enhanced equipment utilization: Optimizes gas cylinder usage and reduces idle time, leading to improved equipment utilization and potential cost savings. • Reduced insurance premiums: A safer workplace, achieved through automation, can lead to lower insurance premiums for fab operators.
Conclusion: Implementing automated gas delivery systems like the GDLS is essential for ensuring safety in semiconductor fabrication while presenting a cost-effective solution for fab operators. By minimizing human error and enabling rapid leak detection, automation offers a proactive approach to safeguarding workers and the environment. This technology has the potential to revolutionize safety practices, enhance operational efficiency, and drive significant cost savings in the semiconductor industry, paving the way for a safer, more efficient, and cost-competitive future.
