The SEMI Smart Manufacturing Initiative has formed a subcommittee of supply chain industry professionals entitled, “Accelerating Sustainability with Smart Manufacturing,” to formulate a roadmap of best practices for pre-existing, brownfield device-making fabs leveraging Industry 4.0 methodologies for reducing Scope 1 greenhouse gas (GHG) and Scope 2 emissions via energy-efficiency at the cleanroom, sub-fab, facilities levels in addition to new, greenfield fab design. A summary of prioritized use cases, assessed following a standard ranking system for expected impact to emissions reductions, will be shown as a guide, to highlight critical areas for decision-makers to address, for the most efficient use of capital. Advanced techniques with respect to connectivity, sensing and predictive analytics such as machine learning and artificial intelligence (AI) will be covered to show the value in facilitating companies to meet sustainability goals, while improving productivity. This roadmap will be expanded to address water usage and material waste in fabs during the subsequent phase.
